Ebeam Process Uniformity Measurement

PURPOSE: To describe the method of dose uniformity measurement using the GEX B3 WINdose B3106 Uniformity Measurement dosimeter strips with the WINdose for Excel Dosimetry Program provided by GEX Corporation. The B3106 strips contain 2 inch wide 10 inch long cards with B3WINdose dosimeters spaced at one inch intervals. The X and Y Uniformity WINdose for Excel worksheets are used to read the optical absorbances of numbered dosimeters provided in the strip arrays. The B3106 strip arrays may be joined to form strips of continuous lengths or staggered/overlapped to increase the measurement interval resolution.